A Practical Guide to Optical Metrology for Thin Films by Michael Quinten PDF

A Practical Guide to Optical Metrology for Thin Films by Michael Quinten PDF

By Michael Quinten

ISBN-10: 3527411674

ISBN-13: 9783527411672

A one-stop, concise advisor on picking and measuring skinny movie thickness via optical methods.

This sensible publication covers the legislation of electromagnetic radiation and interplay of sunshine with subject, in addition to the idea and perform of thickness size, and glossy functions. In so doing, it exhibits the functions and possibilities of optical thickness selection and discusses the strengths and weaknesses of size units in addition to their evaluate methods.

Following an creation to the subject, bankruptcy 2 offers the fundamentals of the propagation of sunshine and different electromagnetic radiation in house and subject. the most subject of this e-book, the selection of the thickness of a layer in a layer stack by means of measuring the spectral reflectance or transmittance, is handled within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. eventually, in bankruptcy 7, the writer discusses a number of commercial functions of the layer thickness dimension, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive motion pictures, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at business and educational researchers, engineers, builders and brands interested in all components of optical layer and skinny optical movie dimension and metrology, method regulate, real-time tracking, and applications.

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A Practical Guide to Optical Metrology for Thin Films by Michael Quinten


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